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XY Microscope Stages for Upright Microscopes – H105 for Semiconductor Wafer Inspection

Product Details

An extensive range of motorized XY stages to fit the majority of upright microscopes available.

XY Stages for Upright Microscopes – H105 for Semiconductor Wafer Inspection (154mm x 154mm)

The H105 is especially well-suited for applications that typically involve large specimens. For example, for performing scanning of a wide range of semiconductor wafers, photo masks, and printed circuit boards. The H105 can easily accommodate 6″ wafers. H105 stage are fully mapped for improved metric accuracy

  • Suitable for most major brand microscopes.
  • 1um or better repeatability
  • Quiet and reliable
  • Wide range of sample holders
  • Optional 100nm linear scales provide the highest precision available
um um mm/s mm kg mm SPR ** um res
Uni-Directional
Repeatability *
Min Step
Size
Recomended
speed
Max Travel
Range
Weight Ball Screw
Pitch
Motor
Type
Encoders
H105/2 ## +/- 0.7 0.04 24 154 x 154 5 2 200 No
HE05/2 ## +/- 0.7 0.04 24 154 x 154 5 2 200 0.1

 

Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.