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Laser-Driven Light Source EQ-400

Ultra-High Radiance, Broadband Laser-Driven Light Source

EQ-400 LDLS Laser-Driven Light Source

Based on the highly successful Laser-Driven Light Source (LDLS) technology, the
EQ-400 offers the highest radiance and irradiance available in a truly broadband white light source. The
EQ-400 features a compact lamp house, with clean construction that ensures long life and ultimate stability. With a 170nm-2100nm wavelength range, and a choice of source dual-beam output or a single-beam output with retro-reflector, the EQ-400 is flexible for a broad variety of applications.

  • CW laser plasma discharge
  • Very high brightness across spectrum
    – UV-Vis-NIR (170nm – 2100nm)
  • Eliminates need for multiple lamps
    – Replaces D2/Tungsten/Xenon Arc
  • Superior short and long term power stability
    – Repeatable measurements
  • Electrodeless operation for long life
    – Reduced consumable costs
    – Minimal recalibration of instrume
  • Semiconductor Metrology & Inspection
  • UV-Vis-NIR Spectroscopy
  • Monochromator Source
  • Photoemission Electron Microscopy (PEEM)
  • Advanced Imaging
  • Thin-Film Measurements