Product Details
An extensive range of motorized XY stages to fit the majority of upright microscopes available.
The H105 is especially well-suited for applications that typically involve large specimens. For example, for performing scanning of a wide range of semiconductor wafers, photo masks, and printed circuit boards. The H105 can easily accommodate 6″ wafers. H105 stage are fully mapped for improved metric accuracy
| um | um | mm/s | mm | kg | mm | SPR ** | um res | |
| Uni-Directional Repeatability * |
Min Step Size |
Recomended speed |
Max Travel Range |
Weight | Ball Screw Pitch |
Motor Type |
Encoders | |
| H105/2 ## | +/- 0.7 | 0.04 | 24 | 154 x 154 | 5 | 2 | 200 | No |
| HE05/2 ## | +/- 0.7 | 0.04 | 24 | 154 x 154 | 5 | 2 | 200 | 0.1 |
Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.
